円形形体の高精度形状評価法に関する研究(第1報) : 真円度のプロファイル解析の高度化
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概要
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In calibration of roundness measuring instruments, self-calibration techniques are used to obtain a form error component of the workpiece (Hemisphere) and a systematic rotation error component of the probe simultaneously. The multistep method is one of the commonly used self-calibration methods. However, the multistep method has following two problems. One of these problems is that the multistep method can not separate the probe rotation error from the form error of hemisphere completely; unseparated components remain in both error components as forms of Fourier components determined by the step number. The other problem is that the multistep method can not detect the Fourier components whose orders are integral multiple of the number of steps, therefore the smaller the number of steps are the more unseparated Fourier components remain in the calibrated values. In this research, two analysis techniques are proposed. One is a complete error separation technique which is able to separate the probe rotation error and the hemisphere form error completely. The other is the phase combination method by which calibration results equivalent to higher number of steps can be derived by combining two results of the complete error separation technique with different smaller number of steps. By using these two analysis procedures, unused performance of multistep method is fully exploited, and the uncertainty may be considered to reach to a sub-nanometer level because the separation is now complete. These techniques only use simple algebraic equations without using a Fourier transform. These techniques are considered to be applicable not only to the roundness measurement but also to the evaluation of the form profile which can be expressed by the 360°closure systems such as various circular forms.
- 公益社団法人精密工学会の論文
- 2007-01-05
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