単源蒸着によるZnTe薄膜の形成とその性質

概要

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Using electron microscopy and X-ray diffraction techniques, crystallinity of ZnTe films prepared by the single-source vacuum deposition method is investigated to compare with that of films prepared by means of co-evaporation. Investigations are made with particular regard to the film formed at the deposition rate and the substrate temperature which range from 0.9 to 21 Å.sec^, and room temperature to 400℃, respectively. It is observed that the deposited films consist of polycrystalline only with cubic phase. The crystal orientation is such that the (111) plane is parallel to the substrate surface. Slower deposition rate and higher substrate temperature yield a semi-transparent, reddish orange colored film with larger crystal grain size, enhancing the degree of such a preferred orientation. On the other hand, it is found that higher deposition rate and lower substrate temperature deteriorate the crystallinity. The deposition turns out a grayish brown layer with amorphous structure. Epitaxial growth of cubic ZnTe films is observed on NaCl (100) face cleaved in air.
山形大学の論文
1979-02-20