高真空装置用エアスライドにおける大形差動排気シールの設計

概要

論文の詳細を見る
With the increasing density and performance of a semiconductor, higher precision and higher productivity of semiconductor production equipment have been recently required. Aerostatic table system is one of the most important components in such semiconductor production equipment. In order to maintain the 10^<-5>Pa level high vacuum environment in such equipment, it is necessary to integrate a differential pumping seal system onto the objective aerostatic table system. Therefore, to materialize a table system which is operated in high vacuum equipment, a moving guide rail traveling type air slide equipped with differential pumping seal system was newly developed. In this study, a method for designing the differential pumping seal system was proposed. The proposed design method includes determination of design parameters and design procedures of the differential pumping seal system. Furthermore, performance evaluation of the developed differential pumping seal system was performed and then the usefulness was confirmed.
公益社団法人精密工学会の論文
2006-11-05