レーザアブレーション法による光導波路薄膜の作製
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概要
- 論文の詳細を見る
LiNbO_3 films were prepared by pulsed laser ablation with a KrF excimer laser. These films were characterized by Optical microscope and X-ray diffraction measurement. Consequently, these films have crack-free smooth surfaces and c-axis orientation. To clarity the profile of light in a waveguide, light propagation was calculated with Finite Difference Time Domain Method, and the obtained results were that of an electromagnetic wave attenuated with a waveguide - metal layer - substrate structure and understood that the buffer layer was necessary. In the case of a waveguide of thickness 300[nm] and metal layer of thickness 25[nm], a buffer layer of thickness 300[nm] was enough to prevent attenuation from a simulation.
- 石川工業高等専門学校の論文
- 2006-03-30
著者
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Otsubo Shigeru
Department Of Electrical Engineering Ishikawa National College Of Tecchnology Tsubata
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中平 知映
石川高専専攻科(電子機械工学専攻)2年
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