光導波路用薄膜の損失と評価

概要

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This technical note describes a new method of assessment of styrene thin-films for optical waveguide. Styrene films were coated onto PYREX 7740 glass substrate, in three different ways, by gradient, horizontal, and spinner method. It has been, found that spinner method is especially good for the control of the flatness of surface and the thickness of films. On the other hand, three measurements of slide method, photograph of a streak, and mode spectrum were used for the loss measurement of thin-films. The results proved that they had correlation with each other. Therefore, when one of them was obtained, the other were predictable. A Aluminium-Styrene thin-film evapolated on PYREX 7740 glass substrate was made as a waveguide. The characteristic of this Glass-Aluminium-Styrene waveguide was compared with that of Glass-Styrene waveguide. In case of the Glass-Aluminium-Styrene waveguide, the peak angle of each mode was almost the same and appeared within 2 degree. A new quality factor Q has been proposed for assessment of practicability of the waveguide. This Q has been difined to be P/Δθ, where P is the peak output power of a certain mode, and Δθ is the linewidth. It has been shown that the defined Q factor is more suitable for the assessment of the quality of films than the compared with loss-measurement.
明治大学の論文