金属基材上へのプラズマジェット照射による柱状組織金属酸化物皮膜の形成(機械工学科)

概要

論文の詳細を見る
In this study, in order to obtain some useful information for development of easy columnar structure metal oxide film synthesis process, metal oxide layers were synthesized on mild steel substrate and zirconium substrate by thermal plasma irradiation in open air and investigated by X-ray diffraction and optical microscope. Consequently, 20 μm thick columnar structure iron oxide layer was constructed on the mild steel substrate by only 5 minutes deposition. Besides, in the case of zirconium substrate, result from the X-ray diffraction, it was proved that the zirconium oxide film had the same component as the conventional film deposited under a low pressure environment. From these results, this process was found to have a high potential for rapid columnar structure metal oxide film synthesis process.
足利工業大学の論文
2005-03-18