Detection of Supersonic Waves Emitted from Anomalous Arc Discharge in Plasma Processing Equipment

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概要

• 論文の詳細を見る

• We report, for the first time, a new method of monitoring anomalous arc discharge in plasma processing equipment by detecting supersonic waves emitted at a discharge site. The supersonic wave is detected with an acoustic transducer attached to the outside surface of a plasma chamber. It is demonstrated that the method can detect anomalous discharge both in direct-current (DC) and radio-frequency (RF) plasma equipment. The results suggest that the method can find the location of anomalous discharge sites in the processing chamber.

• 社団法人応用物理学会の論文
• 2000-12-15

著者

• YASAKA Mitsuo

  Tokyo Cathode Laboratory Co., Inc.

• TAKESHITA Masayoshi

  Tokyo Cathode Laboratory Co., Inc.

• Takeshita M

  Tokyo Cathode Lab. Co. Inc. Kumamoto Jpn

• Takeshita Masayoshi

  Tokyo Cathode Laboratory Co. Inc.

• Yasaka M

  Tokyo Cathode Lab. Co. Inc. Kumamoto Jpn

• Yasaka Mitsuo

  Tokyo Cathode Laboratory Co. Inc.

• MIYAGAWA Ryuji

  Kumamoto Industrial Research Institute

関連論文

• Monitoring of Two-Dimensional Plasma Uniformity with Electrostatic Probing of Oxidized Wafer Surface : Semiconductors
• Detection of Supersonic Waves Emitted from Anomalous Arc Discharge in Plasma Processing Equipment
• Micro Arc Monitoring by Detecting Charge Build-Up on Glass Surface of Viewing Port due to Plasma Dispersion in Plasma Processing Equipment
• Micro Arc Monitoring by Detecting Charge Build-Up on Glass Surface of Viewing Port due to Plasma Dispersion in Plasma Processing Equipment

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