Output Characteristics of a Thin-Film Piezoelectric AE Sensor for Magnetic Head-Disk Interaction

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概要

• 論文の詳細を見る

• A new type of acoustic emission(AE)sensor was developed for detecting head-disk interaction in magnetic disk devices. In order to develop a small sensor, we used a thin-film piezoelectric material and mounted it on the Si slider using micromachining techniques. We conducted a basic experiment and a simulation of sensor output, and confirmed that the simulation used here can predict sensor output characteristics. This paper describes the structure of the sensor and the method of simulation. We also performed several other simulations of sensor output characteristics using this method, and confirmed that the new sensor is applicable to tribological research on head-disk interaction.

• 一般社団法人日本機械学会の論文
• 1997-03-15

著者

• Imai Satomitsu

  Data Storage And Retrieval Systems Division Hitachi Ltd.

• BURGER G.J.

  MESA Research Institute, University of Twente

• LAMMERINK T.S.J.

  MESA Research Institute, University of Twente

• FLUITMAN J.H.J.

  MESA Research Institute, University of Twente

• Burger G.j.

  Mesa Research Institute University Of Twente

• Lammerink T.s.j.

  Mesa Research Institute University Of Twente

• Fluitman J.h.j.

  Mesa Research Institute University Of Twente

関連論文

• Output Characteristics of a Thin-Film Piezoelectric AE Sensor for Magnetic Head-Disk Interaction

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