Optical Measurement of Resonant Oscillation and Marangoni Convection-Induced Oscillation in a Molten Silicon Surface

概要

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Surface oscillation due to oscillatory Marangoni flow in a liquid bridge of molten silicon was observed throuhg interferometry. TO obtain higher resolution, interferograms taken from a molten silicon surface and a reference sample were converted to phase-distribution profiles by using spatial phase-measurement. We analyzed the pahse-distribution profiles by measuring the radial displacement, azimuthal phase value gradient, and axial phase value gradient. The total radial displacement was about 1.5μm over a 2.0-s period. The radial displacement and axial phase value gradient showed in-phase correlation, which suggests a traveling wave in tha azimuthal direction. The Fourier spectrum of the radial displecement showed several peaks from 0.5 to 5Hz. These frequencies corresponded to the frequencies of Marangoni flow reported based on other methods. The spectrum also showed two single peaks at 21 and 24.5 Hz. These frequencies agreed well with theoretical resonant frequencies of the liquid bridge.
社団法人応用物理学会の論文
2000-06-15