Observation of Surface Blistering by Grazing Incidence Electron Microscopy
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概要
- 論文の詳細を見る
We demonstrate grazing incidence electron microscopy (GIEM) for observation of surface blistering introduced by energetic particle bombardment. This method enebles us direct and nondestructive observation and characterization of surface protrusions without any modification of the microscope, when it is used in combination with associated analytical instruments. As an example, the surface blistering of D^+-irradiated single crystalline silicon was examined with the aid of the simultaneous application of electron energy-loss spectroscopy (EELS).
- 社団法人応用物理学会の論文
- 2000-06-15
著者
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Muto Shunsuke
Center For Integrated Research In Science And Engineering Nagoya University
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Muto Shunsuke
Center For Integrated Research In Science And Engineering (cirse)
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Tanabe Tetsuo
Center For Integrated Research In Science And Engineering (cirse)
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Matsui Tsuyoshi
Department Of Nuclear Engineering Graduate School Of Engineering Nagoya University
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MUTO Shunsuke
Center for Integrated Research in Science and Engineering, Nagoya University
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