Kinetic Study of the Metalorganic Chemical Vapor Deposition of PbTiO_3 Films from Pb(C_2H_5)_4/Ti(i-OC_3H_7)_4/O_2 Reaction System
スポンサーリンク
概要
- 論文の詳細を見る
Lead titanate(PbTiO_3)films are prepared from mixtures of tetraethyl lead [Pb(C_2H_5)_4], titanium tetraisopropoxide[Ti(i-OC_3H_7)_4]and oxygen at temperatures ranging from 823 to 873 K by the low-pressure chemical vapor deposition(LPCVD)method. The kinetics of the film growth process has been studied, including investigating the growth rate dependency at various substrate temperatures and the concentrations of Pb(C_2H_5)_4, Ti(OC_3H_7)_4, and O_2, respectively.A reaction model applying the Eley-Rideal mechanism is proposed to explain the experimental film growth rate dependency. The model involves (i) a strong surface adsorptive species, Pb(C_2H_5)_4, chemisorbing on the substrate surface to react with a dissociatively adsorbed oxygen to form PbO, (ii)a less adsorptive species, Ti(i-OC_3H_7)_4, directly coming from the gas phase to react with the surface adsorbed species to form PbTiO_3 films. The proposed reaction model fits the growth rate data quite well.
- 社団法人応用物理学会の論文
- 2000-08-15
著者
-
Hong L
Department Of Chemical Engineering National Taiwan University Of Science And Technology
-
HONG Lu
Department of Chemical Engineering, National Taiwan University of Science and Technology
-
WEI Chung
Department of Chemical Engineering, National Taiwan University of Science and Technology
-
Hong Lu
Department Of Chemical Engineering National Taiwan University Of Science And Technology
-
Wei Chung
Department Of Chemical Engineering National Taiwan University Of Science And Technology
関連論文
- Kinetic Study of the Metalorganic Chemical Vapor Deposition of PbTiO_3 Films from Pb(C_2H_5)_4/Ti(i-OC_3H_7)_4/O_2 Reaction System
- Film Growth Modeling of Metal Organic Chemical Vapor Deposition of Copper from Copper(I)-Hexafluoroacetylacetonate Vinyltrimethoxysilane in the Presence of Hydrogen
- Composition and Crystal Phase Control of Chemical-Vapor-Deposited Pb(Zrx,Ti1-x)O3 Films on Various Oxide Electrodes with Reactants Pb(C2H5)4, Zr(O-t-C4H9)4, Ti(O-i-C3H7)4 and O2