Initial Stage of Film Growth of Pulsed Laser Deposited YMnO_3

概要

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To improve the polarization-electric field(P-E)characteristic of pulsed laser deposited YMnO_3 film, the initial stage of the film growth was studied. We confirmed that an yttrium-rich layer with poor crystallinity was formed at the initial stage of film growth, and this resulted in the large orientation distribution of the films. Stoichiometric YMnO_3 films without an yttrium-rich layer were successfully obtained by optimizing the laser power density, oxygen gas pressure, and use of ozone gas. Eventually, the P-E characteristic of the YMnO_3 film was improved.
社団法人応用物理学会の論文
2000-09-30