Wavelength Scanning Gauge Block Interferometer Using a Spatial Light Modulator(Instrumentation, Measurement, and Fabrication Technology)

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概要

• 論文の詳細を見る

• A wavelength scanning gauge block interferometer that uses a spatial light modulator for fringe counting was developed. We measured the integer part of the interference fringe order with respect to the synthetic wavelength using a spatial light modulator with no miscounts, and measured the excess fraction part from the interference fringe pattern. Consequently, we could determine the absolute length of a gauge block using only a wavelength scanning laser diode, even when no information on the nominal length of the gauge block was available. The degree of uncertainty was similar to that of a conventional system based on a multiple-wavelength interferometer.

• 社団法人応用物理学会の論文
• 2002-01-15

著者

• BITOU Youichi

  National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba Central 3

• Bitou Y

  National Research Laboratory Of Metrology

• Bitou Youichi

  National Institute Of Advanced Industrial Science And Technology (aist)

• SETA Katuo

  National Research Laboratory of Metrology

関連論文

• Compact I_2-Stabilized Frequency-Doubled Nd:YAG Laser for Long Gauge Block Interferometer
• Polarization Mixing Error Reduction in a Two-Beam Interferometer
• Wavelength Scanning Gauge Block Interferometer Using a Spatial Light Modulator(Instrumentation, Measurement, and Fabrication Technology)
• Gauge Block Measurement Using a Wavelength Scanning Interferometer
• High-accuracy displacement metrology and control using a dual Fabry-Perot cavity with an optical frequency comb generator
• Distance Measurement Using a Pulse Train Emitted from a Laser Diode
• Optical Distance Measurement Using Infer-Mode Beat of Laser
• Compact I2-Stabilized Frequency-Doubled Nd:YAG Laser for Long Gauge Block Interferometer

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