New Formation Technology of Plasma Display Panel Barrier-Rib Structure Using Silicone Rubber Mold Transferred from SU-8 Master Structure(Instrumentation, Measurement, and Fabrication Technology)
スポンサーリンク
概要
- 論文の詳細を見る
A new formation technology for a plasma display panel (PDP) barrier-rib structure is presented to realize a barrier rib with a high aspect ratio and reduce the manufacturing cost. In this study, we used an SU-8 50 photoresist, which is sensitive to UV irradiation, instead of polymethylmethacrylate (PMMA) which is sensitive to X-ray irradiation, so that the silicone rubber mold could be applicable to a large-area PDP. The first step is to produce an SU-8 master structure using amorphous silicon as an adhesion layer between a glass substrate and SU-8 photoresist. Second, a precise soft mold is manufactured for mass replication of the PDP barrier-rib construction, by molding liquid silicone rubber onto the glass substrate with lithographically defined SU-8 master structures. Third, a PDP barrier-rib structure is formed using the pattern-transferring process with a reusable silicone rubber mold. This is a very simple and inexpensive process consisting with printing of barrier-rib paste, drying, pattern-transferring, and sintering. The pattern-transferring process with a soft mold also demonstrates that the disadvantages of the conventional mold pressing process with a hard mold can be overcome. Consequently, by using the pattern-transferring process with the silicone rubber mold transferred from the SU-8 master structure, the desired barrier-rib shapes can be realized with a high aspect ratio and various dimensions.
- 社団法人応用物理学会の論文
- 2002-06-15
著者
-
Son Seung-hyun
School Of Electrical Engineering And Computer Science Kyungpook National University
-
Park Yong-suk
School Of Electrical Engineering And Computer Science Kyungpook National University
-
Choi Sie-young
School Of Electrical Engineering And Computer Science Kyungpook National University
関連論文
- Design and Fabrication of a Micro Electro Mechanical Systems-Based Electrolytic Tilt Sensor
- Characteristics of Amorphous Silicon Dual-Gate Thin Film Transistor Using Back Gate of Pixel Electrode for Liquid Crystal Display Driver
- New Formation Technology of Plasma Display Panel Barrier-Rib Structure Using Silicone Rubber Mold Transferred from SU-8 Master Structure(Instrumentation, Measurement, and Fabrication Technology)
- 32 × 32 SOI CMOS Image Sensor with Pinned Photodiode on Handle Wafer
- An Integrated Amorphous Silicon Gate Driver Circuit Using Voltage-Controlled Capacitance Modeling for High Definition Television (Special Issue : Solid State Devices and Materials (2))