Investigation of Electron Behavior in ECR Plasmas Using a Self-Consistent Particle-Wave Model
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概要
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In finite-sized and inhomogeneous ECR plasmas for materials processing, the behavior of electrons is very complicated because there are highly nonlinear interactions between the electrons and the injected microwaves which can propagate with various modes corresponding to the magnetized bounded plasmas. In this paper, the results of numerical simulation for an argon plasma using a self-consistent particle-wave model are presented and the behavior of electrons in the plasma is investigated. In particular, it is investigated how the electrons absorb the microwave power and how the electron energy distribution function (EEDF) is formed. In addition, the simulated electron density and temperature data are compared with the experimental data by laser measurement. As a result, it is found that the model presented here can reproduce the experimental data well.
- 社団法人応用物理学会の論文
- 1999-07-30
著者
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Muta Hiroshi
Department of Electronics and Control Engineering, Kitakyushu National College of Technology
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Muta Hiroshi
Department Of Electronics And Control Engineering Kitakyushu National College Of Technology
関連論文
- Effect of Electromagnetic Waves Propagating in the Periphery of Electron Cyclotron Resonance Plasma on the Uniformity
- Three-Dimensional Simulation of Microwave Propagation in an Electron Cyclotron Resonance Plasma
- One-Dimensional Simulation of Microwave Propagation in Electron Cyclotron Resonance Plasmas
- Investigation of Electron Behavior in ECR Plasmas Using a Self-Consistent Particle-Wave Model
- Three-Dimensional Simulation of Microwave Propagation in an Electron Cyclotron Resonance Plasma