Metal Alkoxide Solution-Derived Epitaxial Lead Titanate-Based Thin-Film Optical Waveguides
スポンサーリンク
概要
- 論文の詳細を見る
Lead titanate-based thin films were prepared for optical waveguide studies by nonhydrolyzed methoxyethoxide-solution-derived solid-phase epitaxy. PbTiO_3 thin films crystallized with preferred (001) and (100) orientations on SrTiO_3 (100) and MgO (100), respectively. PLT (28/100) thin films had obvious grain structure although they crystallized with a single (110) orientation on sapphire (011^-2) substrates. Epitaxial PZT thin films with a single (100) orientation crystallized on MgO (100) also had obvious grain structure. Epitaxial PZT (52/48) thin films on SrTiO_3 (100) had a single (001) orientation, rocking curve full width at half-maximum of around 0.1°, and smooth surface of rms roughness less than 2 nm. The epitaxial PZT thin films on SrTiO_3 showed optical propagation loss as small as 8 dB/cm at 633 nm.
- 社団法人応用物理学会の論文
- 1995-09-30
著者
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NASHIMOTO Keiichi
Materials Research Laboratory, Fuji Xerox Co., Ltd.
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Nashimoto Keiichi
Corporate Research Laboratories, Fuji Xerox Co., Ltd
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Nakamura S
Fujitsu Laboratories Limited
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NAKAMURA Shigetoshi
Materials Research Laboratory, Fuji Xerox Co., Ltd.
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MORIYAMA Hiroaki
Materials Research Laboratory, Fuji Xerox Co., Ltd.
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Moriyama Hiroaki
Corporate Research Laboratories Fuji Xerox Co. Ltd
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Nashimoto K
Corporate Research Laboratories Fuji Xerox Co. Ltd
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Nashimoto Keiichi
Materials Research Laboratory Fuji Xerox Co. Ltd.
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Nakamura Shigetoshi
Materials Research Laboratory Fuji Xerox Co. Ltd.
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