The Suitability of Ta_2O_5 as a Solid State Ion-Sensitive Membrane
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概要
- 論文の詳細を見る
Ta_2O_5 films were used as ion-sensitive membranes of a solid state H^+ ion sensor. The responses of the Ta_2O_5 films to H^+ ions were characterized by utilizing 2 kinds of solid state devices: a LIS cell and an n-channel ISFET. Ta_2O_5 with different electrical and optical properties and crystalline structures were applied to both devices for an inspection of the relation between those properties and ion-sensitive properties. No substantial influence of the electrical properties of the films was found on the ion-sensitive properties. A crystalline transformation of the Ta_2O_5 film from an amorphous to a polycrystalline state by thermal annealing did not immediately effect the ion-sensitive properties however, aging tests showed it drastically reduced the film lifetime.
- 社団法人応用物理学会の論文
- 1987-12-20
著者
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MORIIZUMI Toyosaka
International Cooperation Center for Science and Technology, Tokyo Institute of Technology
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Miyahara Y
Spring‐8 Hyogo Jpn
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TERAVANINTHORN Utis
International Cooperation Center for Science and Technology, Tokyo Institute of Technology
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MIYAHARA Yuji
Central Research Laboratory Hitachi Ltd.
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Moriizumi Toyosaka
International Cooperation Center For Science And Technology Tokyo Institute Of Technology
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Teravaninthorn Utis
International Cooperation Center For Science And Technology
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