Characteristics of a Guide-Wave Displacement Sensor Based on Wavefront Detection

概要

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The characteristics of a guide-wave displacement sensor based on the wavefront detection are obtained. The displacement is measured by detecting the wavefront gradient of the light reflected from the measured object. The wavefront gradient is determined using the mode interference of the even and odd modes in the double-mode waveguide which is fabricated of silica glass on a Si substrate. The measuring range is 3 μm and the resolution is determined to be less than 1 nm. The object tilting dependence and the stability of the sensor are also measured. Furthermore, sample surfaces are observed and very fine images are obtained using this sensor. The optical system is very simple and the sensor is very compact, hence it will be usefull as a built-in component for various kinds of industrial equipment.
社団法人応用物理学会の論文
1998-06-30