High Resolution Investigation of the Rod-Shaped Scattering from a (111) Si Surface by a Synchrotron Radiation Source

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概要

• 論文の詳細を見る

• By using a high resolution X-ray spectrometer in conjunction with a synchrotron radiation source, the rod-shaped scattering due to crystal truncation (RSCT), which is elongated along the normal of a crystal surface through a Bragg point, was investigated for two (111) silicon wafers of which the surfaces were differently processed. It is shown that the characterization of a crystal surface, on the basis of surface roughness on an atomic scale and the misorientation of mosaic blocks, is really possible by the precise measurement of the RSCT.

• 社団法人応用物理学会の論文
• 1987-12-20

著者

• Sakata Makoto

  Department Of Applied Physics Faculty Of Engineering Nagoya University

• Sakata M

  Omron Corp. Ibaraki Jpn

• Harada Jimpei

  Department Of Applied Physics Faculty Of Engineering Nagoya University

• Harada J

  School Of Natural Science The University Of Electro-communications

• KASHIWAGURA Nobuo

  Faculty of Engineering, Gifu University

• Kashiwagura N

  Gifu Univ. Gifu Jpn

• KASHIHARA Yasuharu

  Department of Applied Physics, Nagoya University

• Kashihara Y

  Department Of Applied Physics Nagoya University

• Kashihara Yasuharu

  Department Of Applied Physics Nagoya University

• KASHIWAGURA Nobuo

  Department of Basic Sciences, Faculty of Engineering, Gifu University

• WILKINS Stephen

  CSIRO, Division of Materials Science and Technology

• STEVENSON Andrew

  CSIRO, Division of Materials Science and Technology

• Stevenson Andrew

  Csiro Division Of Materials Science And Technology

• Wilkins Stephen

  Csiro Division Of Materials Science And Technology

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