Optical Properties of GaAs(001) Surface during Desorption of As Atoms

概要

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The surface photoabsorption (SPA) signal from the GaAs (001) surface was measured at the angle of incidence between 69゜ and 83゜. We found two processes of As desorption during H_2 purge after AsH_3 injection. The SPA signals for the two processes had different time constants and different angle dependence. The angle dependence indicated that the change of the SPA signal was due to both the optical absorption of the surface and the refractive index change of the surface layer.
社団法人応用物理学会の論文
1993-09-15