Corrugated Structures on Si(110) Surfaces Treated in Ammonium Fluoride Solutions
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概要
- 論文の詳細を見る
We have investigated structures on Si (110) surfaces treated in ammonium fluoride solutions using infrared light absorption spectroscopy and reflection high-energy electron diffraction. It has been found that the surface is smoothed along the [110] direction, while corrugation remains across the [110] direction on an atomic scale. The surface has been found to be terminated by coupled monohydride with the same stretch vibration frequency of monohydride at step edges on vicinal Si (111) surfaces. The absorption coefficient of coupled monohydride hasbeen compared to that of uncoupled monohydride on Si (111) terraces.
- 社団法人応用物理学会の論文
- 1994-08-15
著者
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Hirashita Norio
Vlsi R&d Center Oki Electric Industry Co. Ltd.
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Fujita Ken
Vlsi Research And Development Center Oki Electric Industry Co. Ltd.
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