Time Variation of Surface Temperature during Electron Beam Evaporation
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概要
- 論文の詳細を見る
Time variation of the surface temperature of copper during electron beam evaporation was measured with a high-speed infrared thermometer. The periodic variation of the surface temperature was observed with the frequency of 100 Hz, which was synchronized with the relative atomic beam density measured by a mass spectrometer. Moreover, the fluctuation of the atomic beam density was consistent with that estimated from the surface temperature variation. It was found that the fluctuation in the atomic beam density depended on the periodic variation of the surface temperature.
- 社団法人応用物理学会の論文
- 1994-05-01
著者
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Ohba Hironori
Department Of Chemistry And Fuel Research Japan Atomic Energy Research Institute
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Shibata Takemasa
Department Of Chemistry And Fuel Research Japan Atomic Energy Research Institute
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ARAKI Masanori
Department of Fusion Engineering Research, Japan Atomic Energy Research Institute
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Araki Masanori
Department Of Fusion Engineering Research Japan Atomic Energy Research Institute
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