Characterization of Au Thin Film by Glancing-Incidence and -Takeoff X-Ray Fluorescence Spectroscopy
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概要
- 論文の詳細を見る
We have developed an experimental apparatus for a glancing-incidence and -takeoff X-ray fluorescence spectroscopy (GIT-XRF) to analyze thin films and material surfaces. In this method, the fluorescent X-rays from the thin film are measured at various incident and takeoff angles, and the thin film is cross-checked. Therefore, the GIT-XRF method allows for detailed characterization of the thin film.
- 社団法人応用物理学会の論文
- 1994-09-01
著者
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HIROKAWA Kichinosuke
Institute for Materials Research, Tohoku University
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SATO Shigeo
Institute for Advanced Materials Processing, Tohoku University
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Tsuji Kouichi
Institute For Materials Research Tohoku University
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Hirokawa Kichinosuke
Institute For Materials Research Tohoku University
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