High-Performance Fiber-Optic Fabry-Perot Pressure Sensor with Si_3N_4/SiO_2/Si_3N_4 Diaphragm

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概要

• 論文の詳細を見る

• The high-performance fiber optic Fabry-Perot pressure sensor with a Si_3N_4/SiO_2/Si_3N_4 (N/O/N) diaphragm fabricated using micromachining technology in anisotropic etchant KOH solution was developed. The configuration of this sensor was a 2-cm-long fiber optic Fabry-Perot interferometer bonded to a 0.6-μm-thick diaphragm. When the area of the N/O/N diaphragm used in the experiments was 2×2 mm^2, the pressure sensitivity was 0.11 radian/kPa, and when the area was 8×8 mm^2, the pressure sensitivity was 1.57 radian/kPa. The relationship between the applied pressure and the phase change was linear.

• 社団法人応用物理学会の論文
• 1999-12-15

著者

• Park Jaehee

  Keimyung University Department Of Electronics Engineering

• Park Jaehee

  Keimyung University Department Of Electronic Engineering

• KIM Myung-Gyoo

  Electronics & Telecommunication Research Institues

• Kim Myung-gyoo

  Electronics & Telecommunication Research Institues

関連論文

• High-Performance Fiber-Optic Fabry-Perot Pressure Sensor with Si_3N_4/SiO_2/Si_3N_4 Diaphragm
• Fiber Optic Intrusion Sensor using Coherent Optical Time Domain Reflectometer

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