Evaluation of Hydrogenation on Semiconductor Surfaces Treated with Hydrogen-Plasma Beam Excited by Electron Cyclotron Resonance : Beam Induced Physics and Chemistry

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-04-30

著者

• KISHIMOTO Akihiro

  Faculty of Engineering, Hiroshima University

• HAMAOKA Kazuhiko

  Faculty of Engineering, Hiroshima University

• KOUI Tomoaki

  Faculty of Engineering, Hiroshima University

• Koui Tomoaki

  Faculty Of Engineering Hiroshima University

• Suemune I

  Hiroshima Univ. Higashihiroshima

• Kishimoto A

  Faculty Of Engineering Hiroshima University

• Yamanishi Masamichi

  Faculty Of Engineering Hiroshima University

• Suemune Ikuo

  Faculty Of Engineering Hiroshima University

• Hamaoka Kazuhiko

  Faculty Of Engineering Hiroshima University

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