The Grotesques of Oval Defects on the MBE-Grown GaAs Layers
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概要
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In addition to the regular oval defect, two grotesque features, named pyramidal and ellipsoidal shaped defects, have been observed on MBE-grown GaAs layers. Those grotesque defects were demonstrated to have come from a foreign contamination of the Ga source. A method for reducing those defects is also proposed.
- 社団法人応用物理学会の論文
- 1987-05-20
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- The Grotesques of Oval Defects on the MBE-Grown GaAs Layers