A New Plasma Diagnostic Capacitance Method

概要

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In this paper, a new plasma diagnostic method based on a theoretical model which permits the calculation for the associated admittance with a cylindrical or spherical ion sheath probe is reported. In this way a theoretical curves set of the ion sheath capacitance versus frequency, for several electron densities and temperatures is obtained. The identification with the appropriate theoretical curve of any experimental value of ion sheath capacitance permits to obtain the electron plasma density and temperature. The results obtained with this method are in agreement with the experimental values obtained by using the I-V characteristic method. This new method has advantage over other diagnostic techniques based on Langmuir probes, since the probe current and therefore the plasma perturbation is very small.
社団法人応用物理学会の論文
1987-05-20