Analytical Calculation of Energy Spectra of keV Light Particles Reflected from Solid Surfaces
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概要
- 論文の詳細を見る
The energy spectra of keV light particles reflected from solid surface have been calculated within the single collision approximation, taking account of the angular and lateral deviations of the indident beam caused by multiple small-angle collisions. The particle and energy reflection coefficients (R_N and R_E) have also been calculated as a function of the reduced energy (ε_0) in Thomas-Fermi units. It is shown that for various targets, the shape of the energy spectra at given incident and ejection angles depends only on ε_0 and that the values of R_N and R_E are scaled by a universal function of ε_0. Typical values of the calculated particle reflection coefficients for Au and C, together with the energy spectra for Au at normal indidence and for Fe at oblique incidence are shown to agree well with the experimental data on keV H^+ obtained by the Garching group.
- 社団法人応用物理学会の論文
- 1983-07-20
著者
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Morita Kenji
Department Of Crystalline Materials Science Faculty Of Engineering Nagoya University
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Morita Kenji
Department of Applied Bioscience and Biotechnology, Faculty of Life and Environmental Science, Shimane University
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