Superconducting BaPb_<1-x>Bi_xO_3 Thin Films by RF Magnetron Sputtering
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概要
- 論文の詳細を見る
RF planar magnetron sputtering has been adopted for obtaining superconducting BaPb_<1-x>Bi_xO_3 (BPB) thin films. Using a target with excess Pb and Bi, smoothly surfaced BPB films with T_c above 9 K were obtained at a deposition rate as high as 400 Å/min. It was found that the film properties do not strongly depend on sputtering pressure and voltage as compared with that of the conventional sputtering method. Furthermore, the reproducibility has been greatly improved.
- 社団法人応用物理学会の論文
- 1983-12-20
著者
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MURAKAMI Toshiaki
Ibaraki Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation
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Murakami Toshiaki
Ibaraki Electrical Communication Laboratories Ntt
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Suzuki Minoru
Ibaraki Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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Suzuki Minoru
Ibaraki Electrical Communication Laboratory Nippon Telegraph & Telephone Public Corporation
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Murakami Toshiaki
Ibaraki Electrical Commuication Laboratory Nippon Telegraph And Telephone Public Corporation
関連論文
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- Hysteresis Loop in Current-Voltage Curve for BaPb_Bi_O_3 Josephson Junction Array in a Microwave Field
- Thin Film Preparation of Superconducting Perovskite-Type Oxides by rf Sputtering : THIN FILM
- Aging Effects of Li-Ti-0 Superconducting Compounds
- Observation of Grain Boundary Josephson Current in BaPb_Bi_O_3 Films
- Li-Ti-O Superconducting Compounds Prepared by Hot-Pressing
- Preparation of Superconducting BaPb_Bi_xO_3 Thin Films by RF Sputtering
- Superconductivity in Ba_Sr_xPb_Bi_O_3
- Highly Sensitive Optical Detector Using Superconducting Oxide BaPb_Bi_O_3 (BPB)
- Electromagnetic Coupling Effects in BaPb_Bi_O_3 Two-Dimensional Josephson Tunnel Junction Arrays
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- Electrical Properties of Li-Ti-O Ceramics : F: FERROELECTRIC MATERIALS
- Single Crystal Growth of Ba(Pb, Bi)O_3 from Molten KCl Solvent
- Effect of Substiution in Perovskite-type Oxide Superconductor : F: FERROELECTRIC MATERIALS
- Superconducting BaPb_Bi_xO_3 Thin Films by RF Magnetron Sputtering
- Preparation of Conductive SrMoO_3 Thin Films and Their Application to Electrodes for Thin Film Capacitors : T: Thin Film