Cracks and Corrosion in PSG Passivation Glass
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概要
- 論文の詳細を見る
Aluminium corrosion and cracks in single-layer and triple-layer phosphosilicate glasses (PSG) were studied. The optimum phosphorus concentration for producing PSG passivation glass was found to be 3 to 5 mol %. The corrosion of the aluminium was found to proceed by two different processes; a simple electrolytic reaction with water induced by high current density and a cathodic reaction due to the high phosphorus concentration. In the formation of cracks in the glass, the deposition temperature was very important, as was the phosphorus concentration.
- 社団法人応用物理学会の論文
- 1982-05-20
著者
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Imaoka Sumio
Semiconductor Research Laboratory Pioneer Electronic Corporation
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TAKAHASHI Kenji
Semiconductor Research Laboratory, Pioneer Electronic Corporation
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KITAJIMA Kazuya
Semiconductor Research Laboratory, Pioneer Electronic Corporation
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Kitajima Kazuya
Semiconductor Research Laboratory Pioneer Electronic Corporation
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Takahashi Kenji
Semiconductor Research Laboratory Pioneer Electronic Corporation
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