Non-Linear Effects of Molecular Ion Bombardment on Sputtering Yield

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概要

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• A shock wave model is proposed in order to study theoretically non-linear effects in sputtering phenomena with molecular ion bombardment. Sputtering yields from Ag, Au, and Pt bombarded by diatomic ions of Sb, Se, and Te are calculated using the present model at the enegies of 10-2000 keV. The calculation is carried out with time-dependent simultaneous collision-cascades and their overlap at perpendicular ion incidence. The model shows that the observed sputtering yields are due to both linear and non-linear effects, i.e. Y=Y_L+Y_<NL>. In particular, non-linear interaction between recoil atoms causes high sputtering yields. An explanation using the non-linear effect is also given for bombarding at the maximum yield.

• 社団法人応用物理学会の論文
• 1982-03-05

著者

• Karashima Shosuke

  Department Of Electrical Engineering Faculty Of Engineering Science University Of Tokyo

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