Resolution of Scanning Acoustic Microscope in Sub-Surface Imaging : Mechanical and Acoustical Properties

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概要

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• The resolution of the scanning acoustic microscope in sub-surface imaging is theoretically investigated. A formula for the point spread function is derived by assuming that a delta-functional point relflector exists inside a flat-topped solid specimen. The resolution is then evaluated using this point spread function and Rayleigh's criterion. Calculated results show that higher resolution can be obtained by detecting the shear waves than by detecting the longitudinal waves.

• 社団法人応用物理学会の論文
• 1988-05-20

著者

• Ohno Masahiro

  Research Department Olympus Optical Co. Ltd.

関連論文

• Resolution of Scanning Acoustic Microscope in Sub-Surface Imaging : Mechanical and Acoustical Properties
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