Theoretical Investigation of Total Secondary Electron Yield for Teflon

概要

論文の詳細を見る
The simplest physical model of the ≈1 eV-2.5 keV electron scattering in insulating polymers is proposed. The simulation of electron trajectories was performed using Monte Carlo technique. The integral characteristics of electron scattering such as total secondary electron yield and backscattering coefficients for Teflon were investigated for 50 eV-2.5 keV electron beams. The difference between theoretical and experimental data was within 50%.
社団法人応用物理学会の論文
1998-07-15