Current-Voltage and Capacitance-Voltage Characteristics of Metal/Oxide/6H-Silicon Carbide Structure
スポンサーリンク
概要
- 論文の詳細を見る
Current-voltage (I-V) and capacitance-voltage (C-V) characteristics of metal/SiO_2/6H-SiC structure fabricated on the concave surface in (0001^^-)C-face 6H-SiC p/n double epitaxial wafers were studied. Breakdown field of thermally grown gate oxide and effective charge density at SiO_2/6H-SiC interface on sloped surface of the metal/oxide/semiconductor (MOS) structure were measured for the first time to be 9.2 MV/cm and 2.2-2.5×10^<12> cm^<-2>, respectively, for both p- and n-epilayers. Fabricated SiC CONCAVE-MOS field-effect-transistor (FET) including the concave MOS structure achieved FET operation with blocking voltage of 250 V. Temperature dependence of the threshold voltage was -27 mV/K, which is considerably larger than the ideal value of -1.6 mV/K, due to high interface state density.
- 社団法人応用物理学会の論文
- 1995-10-15
著者
-
原 一広
「応用物理」編集委員会
-
Hara Kunihiko
Research & Development Department Nippondenso Co. Ltd.
-
Tokura N
Research Laboratories Nippondenso Co. Ltd.
-
Tokura Norihito
Research And Development Dept. Nippondenso Co. Ltd.
-
Miyajima Takeshi
Research Laboratories Nippondenso Co. Ltd.
-
Fuma Hiroo
Toyota Central Research & Development Labs. Inc.
-
Fuma Hiroo
Toyota Central Research Laboratories Inc.
-
HARA Kazukuni
Research Laboratories, Nippondenso Co., Ltd.
関連論文
- 31a-A-11 時間分解SAXS実験による卵白のゲルーガラス様転移における構造変化の観察II
- 環境・エネルギー技術
- 導電性粒子分散系におけるインピーダンス特性
- 28a-A-3 エポキシ樹脂における硬化初期過程の観測
- 編集にあたって
- 基礎編/有機分子エレクトロニクスの基礎と応用
- 発展する量子エレクトロニクス応用
- 基礎講座
- 基礎講座
- 基礎講座 : 基礎編/有機分子エレクトロニクスの基礎と応用
- 光インターコネクション技術の新展開
- 基礎講座
- 基礎講座 : 基礎編/有機分子エレクトロニクスの基礎と応用
- 基礎講座
- 基礎講座
- 基礎講座
- イオン化による乾燥PAAmゲルの低周波ラマンスペクトルの変化 (第41回京都大学原子炉実験所学術講演会 報文集)
- 高分子ゲルにおける網目溶媒間相互作用のダイナミクスに及ぼす影響 (第40回京都大学原子炉実験所学術講演会)
- 14pXE-14 S-Cl 混合系のラマン散乱(液体合金, 液体半導体, 分子性液体, 領域 6)
- 28aWK-13 液体S-Cl混合系のラマン散乱(液体金属・イオン性液体・分子性液体)(領域6)
- Structure Investigation of Metal Ions Clustering in Dehydrated Gel Using X-ray Anomalous Dispersion Effect
- Heat-Induced Evolution of the Mesoscopic Structure of Dehydrated Poly(vinyl alcohol) Gel
- Cepstrum Analysis for Surface Waves on Gels
- 加熱及び加圧による卵白のゲル化過程における光学的測定
- 29p-PSB-13 アクリルアミドゲル乾燥過程におけるラマン散乱観測
- Excess Oxygen in 12CaO・7Al_2O_3 Studied by Thermogravimetric Analysis
- Award accounts: The Chemical Society of Japan award for young chemists for 2005: Functionalities of a nanoporous crystal 12CaO・7Al2O3 originating from the incorporation of active anions
- PB-4 ゲル表面波のケプストラム解析
- PA9 ゲル化点近傍における表面波伝播特性と粘弾性(ポスターセッション2)
- 6a-YA-2 ゲル化点近傍における表面波特性の時間変化2
- タングステン酸フォトクロミズム増感添加物の水素解離エネルギー
- 添加物の化学構造とタングステン酸ゲルのフォトクロミズム増感の関係
- 高分子添加によるタングステン酸膜の光着色増感現象
- 光学的手法によるゲル形成過程の力学的物性の測定
- Structure Investigation of Metal Ions Clustering in Dehydrated Gel Using X-ray Anomalous Dispersion Effect
- Frequency Dispersion in Elastic Property During the Glass Transition of Dehydrated Polyacrylamide Gel
- Microphase Separation in Dehydrated N-isopropylacrylamide/sodium Acrylate Gel
- Elastic Anomaly and Glass Transition in Dehydrated Egg White Gel
- Difference in Low Frequency Raman Spectra between Dehydrated Egg White and the Dehydrated Heat-Treated Gel
- Change in the Low-Lying Raman Scattering Spectrum in the Glass Transition of Dehydrated Polyacrylamide Gel
- Raman Peak in Low-Frequency Region of Dehydrated Egg-White Gel
- Raman Scattering Study during the Dehydration Process of Polyacrylamide Gel
- Simultaneous Analysis of Total Reflection X-Ray Diffraction and Fluorescence from Copper-Phthalocyanine Thin Films during Evaporation Process
- Nucleation and Growth of Cu Adsorbates on Hydrogen-Terminated Si(111) Surface in Solution
- Anion Incorporation-induced Cage Deformation in 12CaO・7Al_2O_3 Crystal
- Selective Area Growth by Metal Organic Vapor Phase Epitaxy and Atomic Layer Epitaxy Using Ga_2O_3 as a Novel Mask Layer
- Dimethylamine as a Carbon Remover in Atomic Layer Epitaxy of AlAs
- Small-Angle Neutron Scattering Observation of Aqueous Suspension of Microcrystalline Cellulose
- Some Features in Gel Drying Process and Dehydrated Substances
- 多方向カンチレバー走査によるTGS(010)劈開面の原子間力顕微鏡(AFM)観察
- Formation of Highly Conductive p-Type ZnSe Using Li_3N Diffusion
- AFM Observation of Ferroelectric Domains on TGS Cleavage Surface
- Blue-Green Stimulated Emission in Lattice-Matched ZnHgSSe/ZnSSe Double Heterostructures by Optical Pumping
- Blue-Emitting ac-Electroluminescent Cells Based on ZnS:Tm, Li Powder Phosphors
- CONCAVE-DMOSFET : A New Super-Low On-Resistance Power MOSFET
- A 3-Terminal AT-Cut Quartz Resonator with Shield Electrodes
- Propagating Property of Surface Waves and Viscoelasticity near the Gelation Point
- Gelation and Glass Transition in Thermosetting Process of Epoxy Resin
- Silicon Cluster Terminated by Hydrogen, Fluorine and Oxygen Atoms : A Correlation with Visible Luminescence of Porous Silicon
- 高分子ゲルの乾燥に伴う転移挙動と不均一構造
- AT-cut Quartz Resonators with Inverted-Mesa Electrodes
- Correlation between the Photochromic Enhancement in Tungstic Acid and the O-C-H Bond irn Additives
- High Temperature Operated Enhancement-Type β-SiC MOSFET : Silicon Devices and Process Technologies(Solid State Devices and Materials 1)
- Nitrogen Ion Implantation and Thermal Annealing in 6H–SiC Single Crystal
- Current-Voltage and Capacitance-Voltage Characteristics of Metal/Oxide/6H-Silicon Carbide Structure
- Nitrogen Ion Implantation and Thermal Annealing in SiC Single Crystal