Temperature Profiles on Liquid Metal Surface during Electron Beam Evaporation
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概要
- 論文の詳細を見る
The liquid surface of copper during electron beam evaporation was imaged by a lens through a band-pass filter and a double mirror system on a charge-coupled-device (CCD) camera. Temperature profiles were obtained from spectral radiance profiles imaged by the CCD camera using Planck's law of radiation. The maximum temperature was 2040±20 K at the electron beam power of 4.5 kW. The measured surface temperatures agreed with those estimated from the deposition rate measured by a quartz-crystal thickness monitor.
- 社団法人応用物理学会の論文
- 1995-08-15
著者
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Ohba Hironori
Department Of Chemistry And Fuel Research Japan Atomic Energy Research Institute
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Shibata Takemasa
Department Of Chemistry And Fuel Research Japan Atomic Energy Research Institute
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