Analytical Threshold Voltage Formula Including Narrow-Channel Effects for VLSI Mesa-Isolated Fully Depleted Ultrathin Silicon-On-Insulator N-Channel Metal-Oxide-Silicon Devices
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概要
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We report an analytical threshold voltage formula taking into consideration narrow-channel effects for mesaisolated fully depleted ultrathin silicon-on-insulator (SOI) n-channel metal-oxide-silicon (NMOS) devices based on a quasi-two-dimensional approach. From the analytical formula, contrary to LOCOS-isolated bulk NMOS devices, the narrow-channel effects in the mesa-isolated fully depleted ultrathin SOI NMOS devices are due to elevation of the electrostatic potential in the conducting channel near the sidewall.
- 社団法人応用物理学会の論文
- 1995-08-15
著者
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Kuo James
Rm. 338 Department Of Electrical Engineering National Taiwan University
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Su Ker-wei
Rm. 338 Department Of Electrical Engineering National Taiwan University
関連論文
- Analytical Threshold Voltage Formula Including Narrow-Channel Effects for VLSI Mesa-Isolated Fully Depleted Ultrathin Silicon-On-Insulator N-Channel Metal-Oxide-Silicon Devices
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