Novel Method for Defect Detection in Al Stripes by Means of Laser Beam Heating and Detection of Changes in Electrical Resistance

概要

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We have successfully detected defects (voids and Si nodules) in Al stripes using an optical beam induced current (OBIC) system in which defects, even those beneath a metal surface, were detectable as the difference in changes in resistance, produced by laser beam heating, between defective and defect-free areas. Our method, which we refer to as optical beam induced resistance change (OBIRCH), is nondestructive since the temperature increase caused by laser irradiation is on the order of 1℃ and the density of the base current applied to the stripes is on the order of 10^6 A/cm^2 or less. The results of scanning ion microscopy (SIM) (conducted after areas identified by OBIRCH as being defective had been successively cross-sectioned with a focused ion beam [FIB]) indicated that the minimum void size detectable by OBIRCH was on the order of 10^<-3> μm^3, and we are able to show that OBIRCH has many advantages over conventional void detection methods.
社団法人応用物理学会の論文
1995-05-15