Imaging in an Optical Projection System with a Laser Light Source. I : Gaussian Laser Light Illumination
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概要
- 論文の詳細を見る
Intensity distributions for a line-and-space pattern with 5 lines are calculated using a one-dimensional model. Their dependence on Gaussian laser light illumination is analyzed. The laser light travels distance z and illuminates a second light source plane for an illumination system. The complex coherence factor μ_<12> at the object plane has an absolute value of 1, but a change in the phase of μ_<12> becomes greater with increasing distance z or coherence factor σ_c. Compared with imaging in incoherent light source systems, intensity distributions at the image plane are more easily varied depending on z and σ_c, and focal tolerance is narrower.
- 社団法人応用物理学会の論文
- 1995-03-15
著者
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KAWAI Yoshio
NTT LSI Laboratories
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Takamoto Kiichi
Ntt Lsi Laboratories
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Takamoto Kiichi
Ntt Lsi Laboratories:(present Address)research Laboratories Nippondenso Co. Ltd.
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