Imaging in an Optical Projection System with a Light Source Composed of Point Sources

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概要

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• The effects of a points source on imaging characteristics are examined using a one-dimensional model. Intensity distributions for a line-and-space pattern with 5 lines are calculated and the imaging characteristics are evaluated, compared with those obtained using a plane-source system. In a system with a light source composed of 2 point-sources, the focal tolerance determined from linewidth and contrast becomes maximum. Using a light source composed of 3 point-sources, the line-and-space pattern is imaged with precise linewidths while maintaining a focal tolerance slightly larger than that for the plane-source system.

• 社団法人応用物理学会の論文
• 1995-01-15

著者

• Takamoto K

  Denso Corp. Aichi Jpn

• Takamoto Kiichi

  Ntt Lsi Laboratories

関連論文

• Application of Mark Detection Using the Vibration Method to an Electron Beam Exposure System
• Imaging in an Optical Projection System with a Laser Light Source. I : Gaussian Laser Light Illumination
• Imaging in an Optical Projection System with a Light Source Composed of Point Sources

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