Electron Scattering from Si Surface and Interface by Cross-Sectional Transmission Electron Microscopy
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概要
- 論文の詳細を見る
Streak-shaped scattering, referred to as crystal truncation rod (CTR) scattering in X-ray diffraction, is observed in electron diffraction patterns obtained from the Si surface and the interface boundary by the cross-sectional observation technique. CTR scattering can be seen due to the truncation of a crystal at the side wall of atrench as well as at the surface. It becomes possible to evaluate the morphological quality of the surface and the interface on an atomic scale from CTR scattering in electron diffraction, of which the intensity is sensitive to the roughness.
- 社団法人応用物理学会の論文
- 1994-11-15
著者
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MIYATAKE Hiroshi
ULSI Laboratory, Mitsubishi Electric Corporation
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YONEDA Masahiro
ULSI Laboratory, Mitsubishi Electric Corporation
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Miyatake Hiroshi
Ulsi Development Center Mitsubishi Electric Corporation
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Miyatake Hiroshi
Ulsi Laboratory Mitsubishi Electric Corporation
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Harada Jimpei
Department Of Applied Physics Faculty Of Engineering Nagoya University
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Murayama Keiichi
Ulsi Laboratory Mitsubishi Electric Corporation
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Yoneda Masahiro
Ulsi Laboratory Mitsubishi Electric Corporation
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