Master Recording Using Kr Ion Laser

概要

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Resolution of a master recorder using Kr ion laser was investigated by means of computer simulation and experimentation. Limitary pit length PL_<min> was indicated by the k factor: PL_<min>=k×(wavelength)/(numerical aperture). When the duty of the write pulse DT was 0.5, k was 0.56 in simulation. For DT=0.36, k was 0.57. In the experiment pit widths were measured from scanning electron micrographs. Experimental results showed the same tendency as the simulated results. K factors in the experiment were 15.8 percent (DT=0.5) or 20.7 percent (DT=0.36) worse than those in the simulation. The optical system of the recorder is tested using the Twyman-Green interferometer and the knife-edge method. An interferogram shows a good performance. Measured half-width of the spot was 0.24 μm. It was close to the ideal diameter of 0.23 μm.
社団法人応用物理学会の論文
1992-02-28