Laser Scanning Mode Interference Contrast Microscope and Its Application to Step Height Measurement

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概要

• 論文の詳細を見る

• The image contrast of the laser scanning mode interference contrast (LASMIC) microscope is descrihed. Some experimental results show the high performance of the LASMIC microscope in visualizing small phase changes on the surface of the sample. Furthermore, as a new application of the LASMIC microscope, quantitative measurement of step heights using LASMIC signals is proposed. The principle of this measurement is described theoretically and its effectiveness is verified experimentally.

• 社団法人応用物理学会の論文
• 1993-11-15

著者

• Iwasaki Jun

  Optical Division Research And Development Department Nikon Corporation

• Matsuura K

  Research Institute Of Electrical Communication Tohoku University

• OOKI Hiroshi

  Optical Division, Nikon Corporation

• ARIMOTO Rieko

  Optical Division, Research and Development Department, Nikon Corporation

• SHIONOYA Takashi

  Central Research Laboratory, Nikon, Corporation

• MATSUURA Keiji

  Central Research Laboratory, Nikon, Corporation

• IWASAKI Jun

  Central Research Laboratory, Nikon, Corporation

• Ooki H

  Nikon Corp. Tokyo Jpn

• Ooki Hiroshi

  Optical Division Nikon Corporation

• Arimoto Rieko

  Optical Division Research And Development Department Nikon Corporation

• Shionoya T

  Nikon Corp. Tokyo Jpn

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