Mechanical Properties of Diamond Membranes

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概要

• 論文の詳細を見る

• Polycrystalline diamond films were deposited using the hot-filament chemical vapor deposition method. The fracture strength for these membranes was estimated in a bulge test and from Young's modulus measurement. These mechanical properties are changed by the substrate pretreatment conditions, the methane concentration, and the dc bias application between filaments and substrate. The maximum fracture strength was achieved at 2200 MPa, when 700 mA do bias current was applied. The main characteristics for this film are a small grain size (0.3 μm) with relatively low nondiamond carbon content. It is concluded that the mechanical properties for diamond film are greatly affected by both grain size and nondiamond content in the film.

• 社団法人応用物理学会の論文
• 1993-10-15

著者

• Baba K

  Nec Corp. Kanagawa Jpn

• AIKAWA Yumi

  NEC Corporation, Fundamental Research Laboratories

• BABA Kazuhiro

  NEC Corporation, Fundamental Research Laboratories

• Aikawa Yumi

  Nec Corporation Fundamental Research Laboratories

関連論文

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• Experimantal Study of Inclusive Reaction ^C(γ,π^-) at 44.2°
• Mechanical Properties of Diamond Membranes

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