Modeling and Simulation of High Density Plasmas

スポンサーリンク

概要

• 論文の詳細を見る

• We present a model of an ECM plasma in a cylindrical (z, r) geometry with resonant zone near the substrate surface. The model combines a hybrid (particle ion-fluid electron) treatment of plasma transport with an ad-hoc model of microwave power deposition. The model is used to test the effect of the radial profile of microwave power on the spatial profiles of plasma parameters: plasma density, plasma potential and electron temperature. It is shown that for uniformity of ion flux at the substrate surface, microwave power must be peaked off axis.

• 社団法人応用物理学会の論文
• 1993-06-30

著者

• Graves David

  University Of California

• WU Hanming

  University of California

• P0RTEOUS Robert

  University of California

関連論文

• Modeling and Simulation of High Density Plasmas

スポンサーリンク