Shear Horizontal Acoustic Plate Mode Viscosity Sensor
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概要
- 論文の詳細を見る
Mode analysis of a LiTaO_3 (LTO) plate has been carried out numerically, and an interference-free shear horizontal acoustic plate mode (SH-APM) suitable for measuring the liquid viscosity was found. A viscosity sensor having a liquid container on the side opposite to interdigital transducers (IDTs) was fabricated on X-cut 148° Y-prop LTO. Satisfactory agreement was obtained between the calculated frequency spectrum and the experimental one. A loading test was carried out for a series of Newtonian liquids, which showed good agreement with the perturbation theory.
- 社団法人応用物理学会の論文
- 1993-05-30
著者
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NAKAJIMA Haruhiko
Department of Applied Physics, Faculty of Engineering, University of Tokyo
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Okajima Hiroshi
Research And Development Center Tokimec Inc.
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SATO Toshio
Research and Development Center, Tokimec Inc.
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KASHIWASE Yutaka
Research and Development Center, Tokimec Inc.
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MOTEGI Ryohei
Research and Development Center, Tokimec Inc.
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Kashiwase Yutaka
Research And Development Center Tokimec Inc.
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Nakajima Haruhiko
Department Of Applied Physics Faculty Of Engineering Tokyo University Of Agriculture And Technology
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Nakajima Haruhiko
Department Of Physics Faculty Of General Education Tokyo University Of Agriculture And Technology
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Motegi R
Research And Development Center Tokimec Inc.
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Sato Toshio
Research And Development Center Tokimec Inc.
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