Characteristics of Air Bearings with Small Inlet Holes for a Precision Coordinate Measuring Device
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概要
- 論文の詳細を見る
Air bearings with a 2 mmφ inlet hole were used as the linear bearings for the moving stages of a precision coordinate measuring device. The linearity of the stage motion was such that the coefficient of the quadratic term was less than 10^<-7> mm^<-1>. Various characteristics of air bearings were obtained as functions of the inlet diameter, inlet depth, air pressure, air flow, load, and lift height. A fluid dynamical analysis of these characteristics using simplifying assumptions gave results which agreed with measurements within factors of 2 to 3.
- 社団法人応用物理学会の論文
- 1975-02-05
著者
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Yamamoto S
Department Of Physics University Of Tokyo
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Sugimori Satoru
Department Of Physics The University Of Tokyo:(present Address) Fukuoka Bureau Nhk
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YAMAMOTO Sukeyasu
Department of Physics, University of Tokyo
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KAWAGUTI Minato
Department of Physics, The University of Tokyo
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Kawaguti Minato
Department Of Physics The University Of Tokyo
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Kawaguti Minato
Department Of Physics Faculty Of Science University Of Tokyo
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Yamamoto Sukeyasu
Department Of Physics The University Of Tokyo
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Yamamoto Sukeyasu
Department Of Physics Faculty Of Science The University Of Tokyo
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