On the Determination of Minority Carrier Lifetime and Surface Recombination Velocity from the Transient Response of MOS Capacitors
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概要
- 論文の詳細を見る
A method was developed to measure minority carrier lifetime and surface recombination velocity simultaneously. This method consists of measuring the transient C-V response of several MOS capacitors by application of a step voltage to gate electrodes. Experiment proved that this method was useful in evaluating Si slices.
- 社団法人応用物理学会の論文
- 1972-08-05
著者
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Kano Yasuo
Sony Corporation Research Center
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SHIBATA Akikazu
SONY CORPORATION Research Center
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Shibata Akikazu
Sony Corporation
関連論文
- On the Determination of Minority Carrier Lifetime and Surface Recombination Velocity from the Transient Response of MOS Capacitors
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