スピニングローター真空計の精度に及ぼす温度効果の一解析手法

概要

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A computer simulation was done to analyze fluctuation of the offset pressure of the spinning rotor gauge (SRG) which determines a measurement accuracy in lower pressure. Simulation result were compared with actual measurement of temperature change of the rotor case and offset pressure at starting operation of the SRG. The simulation is based on the heat exchange by radiation between the rotor and rotor case. The rotor temperature was calculated by sequential procedure and the result were converted to the offset pressure. As a result of the simulation, factors of profound influence on the offset pressure were the rate of linear expansion, emissivity, density, and specific heat of the rotor. As the result of the amplitude and time constant of the offset variation showed good agreement with the measurement. This simulation method was also applied to evaluate the influence of change in room temperature on the accuracy of the gauge.
1990-06-15