6. 極短ギャップオゾナイザ : オゾナイザの最近の動向

概要

論文の詳細を見る
Ozone generation under conditions of an extremely short gap length around 0.1mm has been introduced. By setting a shorter gap length, the gas temperature in the discharge gap can be imited to being sufficiently low. Moreover, the dissociation rate of produced ozone by electron impacts is regarded to be limited to a low value. With a gap length around 0.1mm, a high concetration of ozone over 300g/Nm^3 is obtained under a high power density. The Ozone is generated and then decomposed by electron impact. The generation processes are well known, but not the decomposition ones. Especially, the electron energy dependence of the decomposition(dissociation)rate of ozone has not been clarified. A new theoretical model taking into consideration the decomposition rate of ozone by electron impact has been developed as a function of E/N. The calcurated results for ozone generation characteristics by using the estimated decomposition rate are in good accordance with the experimental ones at various gap lengths from 0.05mm to 1.2mm and various gas pressures.
1998-10-25