EFFECTS OF PROCESS PARAMETERS ON THE HIGH PERFORMANCE MAGNETO-OPTICAL DISKS
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概要
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Effects of process parameters on the magnetic and recording characteristics of magneto-optical disk were investigated Magneto-optical media having four layered structure were fabricated under varying sputtering conditions such as sputtering pressure, power. target-to-substrate spacing and incident angle of deposition. Magnetic coercivity was sensitively affected by pressure, power and Larger-to-substrate spacing, since the change in scattering of sputtered atoms at different pressure or power induce a slight change in terbium content. The domain wall transition behavior was strongly influenced by pressure as well. The magneto-optical disk consisting of dense TbFeCoCr layer exhibited a high write bias field sensitivity due to the fast domain wall motion and uniform switching field. As the incident angle of arriving particles increased, despite the excellent perpendicular anisotropy, the nucleation of reverse domains near coercivity became non-uniform. Microstructure of TbFeCoCr layer varying with deposition parameters appeared to play an important role in determining the magnetic and recording characteristics of magneto-optical disk.
- 一般社団法人映像情報メディア学会の論文
- 1993-11-12